A. Goncharov, A. Yunda, Ivan S. Kolinko, S. Goncharova, Oleksii Fesenko
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引用次数: 0
Abstract
The features of modeling the processes of formation of films of refractory compounds are considered by the example of transition metal nitrides. A brief description of modern methods for modeling the growth of coatings is given. And also outlined the range of tasks to be solved.
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