Processes of electroluminescence degradation of light-emitting structures based on thin silicon oxide and nitride films

Abstract

. SiO 2 /Si, SiN 1.2 /SiO 2 /Si and SiO 2 /SiN 0.9 /SiO 2 /Si structures have been fabricated by chemical vapor deposition and thermal oxidation of silicon. The elemental composition and thicknesses of dielectric layers have been studied using Rutherford backscattering spectroscopy, scanning electron microscopy, and spectral ellipsometry. The electroluminescence (EL) of the samples has been investigated in the “electrolyte–dielectric–semiconductor” system at a positive bias voltage applied to the silicon substrate. An intense band with maxima at 1.9 eV appears on the EL spectra of the SiO 2 /Si sample, while the EL spectra of the SiN 1.2 /SiO 2 /Si and SiO 2 /SiN 0.9 /SiO 2 /Si samples are characterized by the presence of bands with the maximum values of 1.9, 2.3 and 2.7 eV. The nature of these bands is discussed. Passing a charge in the range of 100–500 mC/ cm 2 through the SiO 2 /SiN 0.9 /SiO 2 /Si sample, an increase in the EL intensity was recorded in the entire visible range. Passing a charge of 1 C/cm 2 through a sample with a three-layer dielectric film resulted in the EL intensity decrease. It can be explained by the upper oxide layer degradation. It has been shown that silicon nitride deposited on top of the SiO 2 layer protects the oxide layer from field degradation and premature breakdown. The most stable electroluminescence when exposed to a strong electric field is observed for the structure SiN 1.2 /SiO 2 /Si.