Gang Liu, Rommel Relos, Bohumil Janik, Robert Davis, T. Myers, D. Allman, Jeff Hall, S. Vandeweghe, S. Menon, Ed Flanigan
{"title":"Polysilicon Fuse Electrical Voiding Mechanism AP/DFM: Advanced Patterning / Design for Manufacturability","authors":"Gang Liu, Rommel Relos, Bohumil Janik, Robert Davis, T. Myers, D. Allman, Jeff Hall, S. Vandeweghe, S. Menon, Ed Flanigan","doi":"10.1109/ASMC49169.2020.9185389","DOIUrl":null,"url":null,"abstract":"Products in automotive applications demand polysilicon fuse One-time programmable (OTP) solutions with extremely low failure rates. Fundamental understanding of the programming mechanism and key design/programming factors are indispensable to achieving such a goal. This paper presents a real-time poly fuse voiding model supported by electrical waveforms, simulations and physical analysis data. Impacts of fuse design and programming condition changes are also examined.","PeriodicalId":6771,"journal":{"name":"2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)","volume":"15 1","pages":"1-4"},"PeriodicalIF":0.0000,"publicationDate":"2020-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASMC49169.2020.9185389","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Products in automotive applications demand polysilicon fuse One-time programmable (OTP) solutions with extremely low failure rates. Fundamental understanding of the programming mechanism and key design/programming factors are indispensable to achieving such a goal. This paper presents a real-time poly fuse voiding model supported by electrical waveforms, simulations and physical analysis data. Impacts of fuse design and programming condition changes are also examined.
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