Irradiation effects of fragment ions of tetradecane on glass surfaces

2014 20th International Conference on Ion Implantation Technology (IIT) Pub Date : 2014-10-30 DOI:10.1109/IIT.2014.6939979

G. Takaoka, M. Takeuchi, H. Ryuto, Kyohei Hayashi

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Abstract

Vapors of tetradecane (C₁₄H₃₀) were ionized by electron bombardment. The generated fragment ions such as C₃H₇, C₆H₁₃, and C₁₂H₂₅ ions were separated and accelerated towards glass substrates. The acceleration voltage was adjusted between 1.5 kV and 9 kV. The fluence was 4.0 × 10¹⁶carbon atoms/cm². Thin films were deposited on the glass substrates by C₃H₇- and C₆H₁₃-ion irradiation at an incident energy of 0.42 keV per carbon. Raman spectra measurements showed that DLC films were formed by C₃H₇- and C₆H₁₃-ion irradiation with the film thickness being larger in case of C₃H₇. On the contrary, for C₁₂H₂₅-ion irradiation, the glass substrate surface was sputtered at an incident energy of 0.42 keV per carbon. Chemical sputtering occurred by surface reactions of hydrogen and carbon with silicon and oxygen atoms. In addition, the surface characteristics of glass substrates irradiated by C₃H₇, C₆H₁₃ and C₁₂H₂₅ ions were investigated.

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十四烷碎片离子对玻璃表面的辐照效应

十四烷(C14H30)的蒸气被电子轰击电离。生成的碎片离子如C3H7、C6H13和C12H25离子被分离并加速向玻璃衬底移动。加速电压调整在1.5 kV ~ 9 kV之间。丰度为4.0 × 1016个碳原子/cm2。采用入射能量为0.42 keV /碳的C3H7-和c6h13离子辐照在玻璃基底上沉积薄膜。拉曼光谱测量结果表明，C3H7-和c6h13离子辐照形成DLC膜，且C3H7的膜厚较大。而在c12h25离子辐照下，玻璃衬底表面的溅射能量为0.42 keV /碳。化学溅射是由氢、碳与硅、氧原子的表面反应引起的。此外，研究了C3H7、C6H13和C12H25离子辐照玻璃基板的表面特性。

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2014 20th International Conference on Ion Implantation Technology (IIT)

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