An in-depth study on the fabrication of 1055–1064 nm multi-quantum-well and super-lattice laser diodes

A. Wu, H. Tseng, C. Wan, Yan-Kuin Su, Chenming Hu, S. Tsau
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Abstract

The InGaAs/GaAs multi-quantum-well as well as the AlGaAs/GaAs and the GaAsP/GaAs super-lattice laser diodes were successfully fabricated by low-pressure MOCVD system, and a number of novel structures were explored in this systematic investigation. The strain-relief effect and the composition of cladding layers were analyzed in detail. Via a series of growth experiments, we concluded that better lasing efficiency and the minimum threshold current could be obtained from the sample made up of the AlGaAs/GaAs structure combined with the 60% Aluminum content of the AlGaAs cladding layer.
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对1055 ~ 1064 nm多量子阱和超晶格激光二极管的制备进行了深入研究
利用低压MOCVD系统成功制备了InGaAs/GaAs多量子阱、AlGaAs/GaAs和GaAsP/GaAs超晶格激光二极管,并探索了一些新的结构。详细分析了熔覆层的应变缓解效果和熔覆层的组成。通过一系列的生长实验,我们得出AlGaAs/GaAs结构与60%铝含量的AlGaAs包层结合可以获得更好的激光效率和最小阈值电流。
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