{"title":"Productivity improvements utilizing OptiScan, interlaced beam scanning, for Axcelis Purion XE implanter","authors":"S. Satoh, R. Coolbaugh, C. Geary, J. Deluca","doi":"10.1109/IIT.2014.6940026","DOIUrl":null,"url":null,"abstract":"The Axcelis Purion XE is a RF linac based single wafer, hybrid scan, high energy ion implanter. The Purion XE provides customers the highest mechanical throughput with best in class beam currents. It is also equipped with features to fully utilize its high beam current capability such as IntelliScan. IntelliScan maintains precise dose and uniformity even under conditions of extreme photoresist outgassing due to high beam power. To further enhance the Purion XE's industry leading productivity, OptiScan, a system for enhancing the beam utilization, has been developed.","PeriodicalId":6548,"journal":{"name":"2014 20th International Conference on Ion Implantation Technology (IIT)","volume":"1 1","pages":"1-4"},"PeriodicalIF":0.0000,"publicationDate":"2014-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 20th International Conference on Ion Implantation Technology (IIT)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IIT.2014.6940026","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
The Axcelis Purion XE is a RF linac based single wafer, hybrid scan, high energy ion implanter. The Purion XE provides customers the highest mechanical throughput with best in class beam currents. It is also equipped with features to fully utilize its high beam current capability such as IntelliScan. IntelliScan maintains precise dose and uniformity even under conditions of extreme photoresist outgassing due to high beam power. To further enhance the Purion XE's industry leading productivity, OptiScan, a system for enhancing the beam utilization, has been developed.
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