Custom-tailored microfluidic devices and nanoscaled actuators - on the fast track

Abstract

With a rapid prototyping technique complex sensor structures in the nanometer range have been fabricated within a single, maskless process step, using a focused ion beam (FIB) system. This paper shows that with exemplary structures such as complex channel junction structures, micromixers and cantilevers the potential to fabricate arbitrary 3D structures is confirmed. Results demonstrate the excellent suitability of FIB processing for tailoring microchannels and actuator structures for the desired properties. The FIB approach renders a powerful enhancement to existent fabrication technologies.