Pub Date : 2005-06-05DOI: 10.1109/SENSOR.2005.1497514
Hwan-Joo Lee, Do-Eok Kim, D. Kwon, Seung-Ha Lee, Shin-Won Kang
We have studied the development of an optical transcutaneous pCO/sub 2/ gas sensor and analyzer using a non-invasive method. The basic principle of the pCO/sub 2/ measurement adapted Beer-Lambert's law and the embodied system using the NDIR (non dispersive infrared) method. CO/sub 2/ gas reacts with a 4.3 /spl mu/m wavelength, so we selected this wavelength by an optical filter, and used energy decrease by molecule oscillations. We measured the CO/sub 2/ concentration using the MFC (mass flow controller) in basic steps instead of the pCO/sub 2/ gas that can collect by inflicting heat on the outer skin. This measuring system consisted of an IR lamp, an optical filter, an optical reaction chamber, a pyroelectric sensor and a signal processing system. We minimized the volume of the optical reaction chamber in order to make the sensor portable. We made an optical reaction chamber with a Si wafer using MEMS technology and it was shortened to 1 mm. We carried out an experiment in photoreaction length variation from 1 mm to 10 mm. We confirmed the linear graph of CO/sub 2/ concentration variation from 1,000 ppm (parts per million) to 100,000 ppm at 1 mm photoreaction length. The response time of this system was within 2 seconds, which is fairly fast.
{"title":"Development of non-invasive optical transcutaneous pCO/sub 2/ gas sensor and analytic equipment","authors":"Hwan-Joo Lee, Do-Eok Kim, D. Kwon, Seung-Ha Lee, Shin-Won Kang","doi":"10.1109/SENSOR.2005.1497514","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497514","url":null,"abstract":"We have studied the development of an optical transcutaneous pCO/sub 2/ gas sensor and analyzer using a non-invasive method. The basic principle of the pCO/sub 2/ measurement adapted Beer-Lambert's law and the embodied system using the NDIR (non dispersive infrared) method. CO/sub 2/ gas reacts with a 4.3 /spl mu/m wavelength, so we selected this wavelength by an optical filter, and used energy decrease by molecule oscillations. We measured the CO/sub 2/ concentration using the MFC (mass flow controller) in basic steps instead of the pCO/sub 2/ gas that can collect by inflicting heat on the outer skin. This measuring system consisted of an IR lamp, an optical filter, an optical reaction chamber, a pyroelectric sensor and a signal processing system. We minimized the volume of the optical reaction chamber in order to make the sensor portable. We made an optical reaction chamber with a Si wafer using MEMS technology and it was shortened to 1 mm. We carried out an experiment in photoreaction length variation from 1 mm to 10 mm. We confirmed the linear graph of CO/sub 2/ concentration variation from 1,000 ppm (parts per million) to 100,000 ppm at 1 mm photoreaction length. The response time of this system was within 2 seconds, which is fairly fast.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84552481","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-12-01DOI: 10.1109/ICSENS.2004.1426484
A. Llobera, V. Seidemann, J. Plaza, V. Cadarso, S. Buttgenbach
The design, simulation and characterization of a quad beam polymer optical accelerometer is presented. The working principle is based in the modulation of the intensity, by way of causing a misalignment between the waveguides located at the frame and the waveguide placed at the mass. A mechanical sensitivity of 34.1 /spl mu/m/g has been simulated. Stable and robust technology that only comprises two photolithographic steps is also presented. Static characterization was performed by tilting the accelerometer, showing a periodical response, with an experimental optical sensitivity higher than 6dB/g.
{"title":"Surface quad beam polymer optical accelerometer","authors":"A. Llobera, V. Seidemann, J. Plaza, V. Cadarso, S. Buttgenbach","doi":"10.1109/ICSENS.2004.1426484","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426484","url":null,"abstract":"The design, simulation and characterization of a quad beam polymer optical accelerometer is presented. The working principle is based in the modulation of the intensity, by way of causing a misalignment between the waveguides located at the frame and the waveguide placed at the mass. A mechanical sensitivity of 34.1 /spl mu/m/g has been simulated. Stable and robust technology that only comprises two photolithographic steps is also presented. Static characterization was performed by tilting the accelerometer, showing a periodical response, with an experimental optical sensitivity higher than 6dB/g.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74459986","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-12-01DOI: 10.1109/ICSENS.2004.1426328
J. Mizsei
Adsorption usually results in work function shifts on catalytically active surfaces such as semiconductor gas sensors. That is why the vibrating capacitor method is such a valuable tool for investigating gas sensor materials. The article summarises the capabilities of the vibrating capacitor from the simplest, adsorption induced work-function tests to the scanning vibrating capacitor yielded olfactory pictures and chemical pictures. After the brief summary, the latest results are discussed in detail, such as olfactory pictures from semiconductor surfaces, chemical pictures from thin SnO/sub 2/ layer produced by atomic layer epitaxy, and chemical pictures from Pd nanolayer (activator) covered surfaces.
{"title":"Vibrating capacitor: applications in the research of semiconductor gas sensors","authors":"J. Mizsei","doi":"10.1109/ICSENS.2004.1426328","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426328","url":null,"abstract":"Adsorption usually results in work function shifts on catalytically active surfaces such as semiconductor gas sensors. That is why the vibrating capacitor method is such a valuable tool for investigating gas sensor materials. The article summarises the capabilities of the vibrating capacitor from the simplest, adsorption induced work-function tests to the scanning vibrating capacitor yielded olfactory pictures and chemical pictures. After the brief summary, the latest results are discussed in detail, such as olfactory pictures from semiconductor surfaces, chemical pictures from thin SnO/sub 2/ layer produced by atomic layer epitaxy, and chemical pictures from Pd nanolayer (activator) covered surfaces.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87524701","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-12-01DOI: 10.1109/ICSENS.2004.1426243
C.W. Liu, C. Gau, C.S. Yang, B. Dai
The paper describes a low temperature fabrication technique for a micro channel system in which a low thermal conductivity material can be used to form the channel wall. This channel can provide a uniform heat flux boundary condition and good insulation on the wall to prevent heat loss from the channel to the outside ambient. Therefore, detailed micro-scale flow and heat transfer process and information along the channel can be studied. Design considerations and fabrication techniques involved in this processes are discussed. A final measurement for the validation of the heaters and the sensors fabricated and a study of the heat transfer coefficient distributions inside the micro channel are presented.
{"title":"Fabrication and design of a heat transfer micro channel system at low temperature process by MEMS technique","authors":"C.W. Liu, C. Gau, C.S. Yang, B. Dai","doi":"10.1109/ICSENS.2004.1426243","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426243","url":null,"abstract":"The paper describes a low temperature fabrication technique for a micro channel system in which a low thermal conductivity material can be used to form the channel wall. This channel can provide a uniform heat flux boundary condition and good insulation on the wall to prevent heat loss from the channel to the outside ambient. Therefore, detailed micro-scale flow and heat transfer process and information along the channel can be studied. Design considerations and fabrication techniques involved in this processes are discussed. A final measurement for the validation of the heaters and the sensors fabricated and a study of the heat transfer coefficient distributions inside the micro channel are presented.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77154434","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-12-01DOI: 10.1109/ICSENS.2004.1426302
Kyu-ho Shin, C. Moon, T. Lee, Chang-Hyun Lim, Youngjin Kim
A chip embedded flexible packaging scheme has been developed using a thinned silicon chip. Mechanical characteristics of thinned silicon chips are examined by bending test and finite element analysis. Thinned silicon chips (t<50 /spl mu/m) are fabricated by a chemical etching process to avoid possible surface damage. These technologies can be used for an implantable real-time monitoring of blood pressure. Our research targets are developing an implantable blood pressure sensor module and its telemetric measurement. By winding around the coronary arteries, we can measure the blood pressure by capacitance variation of blood vessels.
{"title":"Implantable flexible wireless pressure sensor module","authors":"Kyu-ho Shin, C. Moon, T. Lee, Chang-Hyun Lim, Youngjin Kim","doi":"10.1109/ICSENS.2004.1426302","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426302","url":null,"abstract":"A chip embedded flexible packaging scheme has been developed using a thinned silicon chip. Mechanical characteristics of thinned silicon chips are examined by bending test and finite element analysis. Thinned silicon chips (t<50 /spl mu/m) are fabricated by a chemical etching process to avoid possible surface damage. These technologies can be used for an implantable real-time monitoring of blood pressure. Our research targets are developing an implantable blood pressure sensor module and its telemetric measurement. By winding around the coronary arteries, we can measure the blood pressure by capacitance variation of blood vessels.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72620266","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-12-01DOI: 10.1109/ICSENS.2004.1426221
D. Wicaksono, G. Pandraud, G. Craciun, J. Vincent, P. French
In this report, we present our initial fabrication and characterisation results of a new micromachined biomimetic strain sensor. The new strain sensor is structurally inspired from the natural strain sensor found in insects, commonly called Campaniform sensillum. The high-sensitivity strain sensing capability of Campaniform sensillum is among other things due to its hole-structure, as well as its membrane-in-recess structural features. From previous works in continuum macromechanics, it is widely known that hole-structure amplifies stress and mostly becomes a crack starting point. We fabricated for the first time micromachined Si-based strain-sensing structures inspired from these structural features of Campaniform sensillum. In our initial optical characterisation results of these biomimetic Si-based microstructures, it is confirmed that the hole structural feature amplifies and concentrates strain. Thus, further application for a strain-sensing device is feasible.
{"title":"Fabrication and initial characterisation results of a micromachined biomimetic strain sensor inspired from the Campaniform sensillum of insects","authors":"D. Wicaksono, G. Pandraud, G. Craciun, J. Vincent, P. French","doi":"10.1109/ICSENS.2004.1426221","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426221","url":null,"abstract":"In this report, we present our initial fabrication and characterisation results of a new micromachined biomimetic strain sensor. The new strain sensor is structurally inspired from the natural strain sensor found in insects, commonly called Campaniform sensillum. The high-sensitivity strain sensing capability of Campaniform sensillum is among other things due to its hole-structure, as well as its membrane-in-recess structural features. From previous works in continuum macromechanics, it is widely known that hole-structure amplifies stress and mostly becomes a crack starting point. We fabricated for the first time micromachined Si-based strain-sensing structures inspired from these structural features of Campaniform sensillum. In our initial optical characterisation results of these biomimetic Si-based microstructures, it is confirmed that the hole structural feature amplifies and concentrates strain. Thus, further application for a strain-sensing device is feasible.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74950433","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-12-01DOI: 10.1109/ICSENS.2004.1426320
C. Chestek, P. Samsukha, M. Tabib-Azar, R. Harrison, H. Chiel, S. Garverick
The paper presents the design of a bio-compatible, implantable neural recording device for Aplysia californica, a common sea slug. Low-voltage extracellular neural signals (<100 /spl mu/V) are recorded using a high-performance, low-power, low-noise preamplifier that is integrated with programmable data acquisition and control, and FSK telemetry that provides 5-kbps wireless neural data through 18 cm of saltwater. The telemetry utilizes an 8-cm electric dipole antenna matched to 50 /spl Omega/ by exposing the ends of the antenna to the saltwater. A 3-V lithium ion battery (160 mAh) allows 16 hours of recording. Neural data obtained using extracellular nerve electrodes and a wired interface to this device have 2.5-/spl mu/Vrms noise, comparable to commercial neural recording equipment.
{"title":"Wireless multi-channel sensor for neurodynamic studies","authors":"C. Chestek, P. Samsukha, M. Tabib-Azar, R. Harrison, H. Chiel, S. Garverick","doi":"10.1109/ICSENS.2004.1426320","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426320","url":null,"abstract":"The paper presents the design of a bio-compatible, implantable neural recording device for Aplysia californica, a common sea slug. Low-voltage extracellular neural signals (<100 /spl mu/V) are recorded using a high-performance, low-power, low-noise preamplifier that is integrated with programmable data acquisition and control, and FSK telemetry that provides 5-kbps wireless neural data through 18 cm of saltwater. The telemetry utilizes an 8-cm electric dipole antenna matched to 50 /spl Omega/ by exposing the ends of the antenna to the saltwater. A 3-V lithium ion battery (160 mAh) allows 16 hours of recording. Neural data obtained using extracellular nerve electrodes and a wired interface to this device have 2.5-/spl mu/Vrms noise, comparable to commercial neural recording equipment.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75581029","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-12-01DOI: 10.1109/ICSENS.2004.1426260
Sung‐Jei Hong, D. Moon, J. Han, Sang-Gweon Chang, M. Huh
The sensitivity of a nanocrystalline tin oxide gas sensitive thick film was successfully enhanced by controlling its resistance. For the precise control of the resistance, low temperature catalyst doping (LTCD) method was applied below 300/spl deg/C to dope a Pt catalyst onto nanocrystalline tin oxide particles. Also, a gas sensitive thick film was fabricated using the nanocrystalline tin oxide particles having a size smaller than 10 nm, and it led to an enhanced sensitivity with respect to methane gas. That is, a good and stable sensitivity (R/sub 3500//R/sub 1000/) of 0.64 was achieved after aging for 5 hours at 400/spl deg/C by doping with 5wt% of Pt catalyst onto the tin oxide particle.
{"title":"Control of resistance to enhance the sensitivity of nanocrystalline tin oxide gas sensitive thick film","authors":"Sung‐Jei Hong, D. Moon, J. Han, Sang-Gweon Chang, M. Huh","doi":"10.1109/ICSENS.2004.1426260","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426260","url":null,"abstract":"The sensitivity of a nanocrystalline tin oxide gas sensitive thick film was successfully enhanced by controlling its resistance. For the precise control of the resistance, low temperature catalyst doping (LTCD) method was applied below 300/spl deg/C to dope a Pt catalyst onto nanocrystalline tin oxide particles. Also, a gas sensitive thick film was fabricated using the nanocrystalline tin oxide particles having a size smaller than 10 nm, and it led to an enhanced sensitivity with respect to methane gas. That is, a good and stable sensitivity (R/sub 3500//R/sub 1000/) of 0.64 was achieved after aging for 5 hours at 400/spl deg/C by doping with 5wt% of Pt catalyst onto the tin oxide particle.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80339951","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-12-01DOI: 10.1109/ICSENS.2004.1426210
M. Adam, E. Vasonyi, I. Bársony, G. Vásárhelyi, C. Ducso
A porous Si micromachining technique was used for the formation of single crystalline force sensor elements, capable of resolving the three vectorial components of the load. Similar structures presented so far, are formed from deposited polycrystalline Si resistors embedded in multilayered SiO/sub 2//Si/sub 3/N/sub 4/ membranes, using a surface micromachining technique for cavity formation. In the present work, in the n-type perforated membrane, four implanted piezoresistors were fabricated with their reference pairs on the substrate, in order to form 4 half-bridges for the transduction of the mechanical stress. The HF based porous Si process was successfully combined with conventional doping and Al metallization, thereby offering a possible integration of read-out and amplifying electronics. The 300/spl times/300 /spl mu/m/sup 2/ membrane size allows the formation of large area arrays for tactile sensing using single crystalline sensing elements of superior mechanical properties.
{"title":"Three dimensional single crystalline force sensor by porous Si micromachining","authors":"M. Adam, E. Vasonyi, I. Bársony, G. Vásárhelyi, C. Ducso","doi":"10.1109/ICSENS.2004.1426210","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426210","url":null,"abstract":"A porous Si micromachining technique was used for the formation of single crystalline force sensor elements, capable of resolving the three vectorial components of the load. Similar structures presented so far, are formed from deposited polycrystalline Si resistors embedded in multilayered SiO/sub 2//Si/sub 3/N/sub 4/ membranes, using a surface micromachining technique for cavity formation. In the present work, in the n-type perforated membrane, four implanted piezoresistors were fabricated with their reference pairs on the substrate, in order to form 4 half-bridges for the transduction of the mechanical stress. The HF based porous Si process was successfully combined with conventional doping and Al metallization, thereby offering a possible integration of read-out and amplifying electronics. The 300/spl times/300 /spl mu/m/sup 2/ membrane size allows the formation of large area arrays for tactile sensing using single crystalline sensing elements of superior mechanical properties.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83038220","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2004-12-01DOI: 10.1109/ICSENS.2004.1426259
B. Ding, M. Kikuchi, M. Yamazaki, S. Shiratori
A novel gas sensor composed of electrospun nanofibrous membranes (FM) and quartz crystal microbalance (QCM) was successfully fabricated. The electrospun nanofibers can be deposited on the QCM electrode by electrospinning the homogenous blend solutions of cross-linkable poly(acrylic acid) (PAA) and poly(vinyl alcohol) (PVA). Moreover, the PAA fibrous membranes with different morphology can be deposited on the QCM electrode by electrospinning the PAA solutions with various solvent compositions of H/sub 2/O and ethanol. Sensing experiments were examined by measuring the resonance frequency shifts of QCM due to the additional mass loading. The results showed that the sensing properties were mainly affected by the content of the PAA component in nanofibrous membranes, the morphology of the fibrous membranes, the concentration of NH/sub 3/, and the relative humidity. Additionally, the sensitivity of the FM coated QCM (FM-QCM) sensor was much higher than that of a continuous film coated QCM (CF-QCM) sensor. Furthermore, the PAA FM-QCM sensors exhibited high sensitivity towards low concentrations of ammonia, as low as 130 ppb at the relative humidity of 40 %. The pre-sorbed water in the fibrous membranes was proved to be the key factor affecting the sensitivity of FM-QCM sensors for ammonia.
{"title":"Ammonia sensors based on electrospun poly(acrylic acid) fibrous membranes","authors":"B. Ding, M. Kikuchi, M. Yamazaki, S. Shiratori","doi":"10.1109/ICSENS.2004.1426259","DOIUrl":"https://doi.org/10.1109/ICSENS.2004.1426259","url":null,"abstract":"A novel gas sensor composed of electrospun nanofibrous membranes (FM) and quartz crystal microbalance (QCM) was successfully fabricated. The electrospun nanofibers can be deposited on the QCM electrode by electrospinning the homogenous blend solutions of cross-linkable poly(acrylic acid) (PAA) and poly(vinyl alcohol) (PVA). Moreover, the PAA fibrous membranes with different morphology can be deposited on the QCM electrode by electrospinning the PAA solutions with various solvent compositions of H/sub 2/O and ethanol. Sensing experiments were examined by measuring the resonance frequency shifts of QCM due to the additional mass loading. The results showed that the sensing properties were mainly affected by the content of the PAA component in nanofibrous membranes, the morphology of the fibrous membranes, the concentration of NH/sub 3/, and the relative humidity. Additionally, the sensitivity of the FM coated QCM (FM-QCM) sensor was much higher than that of a continuous film coated QCM (CF-QCM) sensor. Furthermore, the PAA FM-QCM sensors exhibited high sensitivity towards low concentrations of ammonia, as low as 130 ppb at the relative humidity of 40 %. The pre-sorbed water in the fibrous membranes was proved to be the key factor affecting the sensitivity of FM-QCM sensors for ammonia.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2004-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80501194","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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