T. Kobayashi, N. Makimoto, T. Oikawa, A. Wada, H. Funakubo, R. Maeda
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引用次数: 6
Abstract
We have fabricated piezoelectric microcantilevers using tetragonal composition Pb(Zr0.3, Ti0.7)O3 (tetra-PZT) thin films and characterized their displacement-voltage behavior under AC actuation condition. The remnant polarization, coercive voltage and piezoelectric constant d31 of the tetra-PZT thin films have increased to 65.5 μC/Cm2, 20 V, and -42 pm/V by applying AC voltage of 80 V as "wakeup" treatment. The fabricated piezoelectric microcantilevers using tetra-PZT thin films have successfully demonstrated linear displacement-voltage behavior under AC actuation condition between -15 V to 15 V.
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