{"title":"Virtual prototyping of a MEMS capacitive pressure sensor for TPMS using Intellisuite®","authors":"Deepika, M. Mittal, Anurekha Sharma","doi":"10.1109/ISPTS.2012.6260867","DOIUrl":null,"url":null,"abstract":"Tire pressure monitoring system (TPMS) plays an important role in automobile safety. One of the important components of TPMS is a MEMS pressure sensor. This paper presents the virtual prototyping of TPMS which involves design, virtual fabrication and system level modelling of a square diaphragm based capacitive pressure sensor for a given stroke length. Intellisuite® MEMS design tool is used for obtaining the virtual prototype. The analytical expression for the sensitivity of square diaphragm in small deflection regime is derived and comparison of calculated results with simulated is presented.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":"1 1","pages":"25-28"},"PeriodicalIF":0.0000,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISPTS.2012.6260867","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
Tire pressure monitoring system (TPMS) plays an important role in automobile safety. One of the important components of TPMS is a MEMS pressure sensor. This paper presents the virtual prototyping of TPMS which involves design, virtual fabrication and system level modelling of a square diaphragm based capacitive pressure sensor for a given stroke length. Intellisuite® MEMS design tool is used for obtaining the virtual prototype. The analytical expression for the sensitivity of square diaphragm in small deflection regime is derived and comparison of calculated results with simulated is presented.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
