{"title":"MEMS electrostatic energy harvesting device with spray coated electret","authors":"Anxin Luo, Yixin Xu, Siyan Chen, Hanning Dong, Yulong Zhang, Fei Wang","doi":"10.1109/3M-NANO.2017.8286330","DOIUrl":null,"url":null,"abstract":"This paper presents the design and measurement of electrostatic energy harvesting. A spray coated electret based electrostatic energy harvester with out-of-plane gap closing scheme is fabricated using advanced MEMS technology. The size of this device is 13×18 mm2. With the matched resistance of 21 MΩ, an output power of 12 μW is harvested when the resonant frequency is 154 Hz under the acceleration of 28.5 m/s2. The thermal stability of this device is tested on 100 °C, decent power can be output after 34 hours.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"2018 1","pages":"134-137"},"PeriodicalIF":0.0000,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/3M-NANO.2017.8286330","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
This paper presents the design and measurement of electrostatic energy harvesting. A spray coated electret based electrostatic energy harvester with out-of-plane gap closing scheme is fabricated using advanced MEMS technology. The size of this device is 13×18 mm2. With the matched resistance of 21 MΩ, an output power of 12 μW is harvested when the resonant frequency is 154 Hz under the acceleration of 28.5 m/s2. The thermal stability of this device is tested on 100 °C, decent power can be output after 34 hours.
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