Simulation and Fabrication of $\mathrm{A1N}-\mathrm{on}-\mathrm{SiO}_{2}$ based Rib Waveguide for Low Propagation Delay

Abstract

A photonic Rib waveguide, based on Aluminium nitride materials over silica platform, has been proposed for very high speed optical interconnect applications. Single mode condition has been discussed for the $\mathrm{AIN}-\mathrm{on}-\mathrm{SiO}_{2}$ Rib waveguide to ensure the fundamental mode propagation. Numerical simulations have been performed in SMC range and the values of propagation delays have been estimated. The results show that the proposed $\mathrm{AIN}-\mathrm{on}-\mathrm{SiO}_{2}$ Rib waveguide can achieve the significantly lower propagation delays in the range of 48.5 ps/cm to 65.23 ps/cm, which is significantly lesser than the reported propagation delays for $\mathrm{Si}-\mathrm{on}-\mathrm{SiO}_{2}$ based Rib waveguides. The fabrication of $\mathrm{AIN}-\mathrm{on}-\mathrm{SiO}_{2}$ based Rib waveguide has been done for the better realization of the proposed Rib waveguide.