Fabrication of odd-form component using in beam shaping system

付秀华 Fu Xiu-hua, 崔金迪 Cui Jin-di, 贾宗合 Jia Zong-he
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Abstract

In order to realize the aspheric cylindrical mirror of high precision processing,and solve the difficult problems in this field,the aspheric cylindrical mirror processing and testing methods are deeply researched. Classical and modern processing methods are adopted and odd-form component for beam shaping system are fabricated in this paper,which is composed of aspheric cylindrical mirror and cylindrical mirror. A unique production of polishing disk is proposed aiming at the problem that the surface shape is controlled hardly. Results show that the surface error is 0. 848 7μm by the profilometer detecting,which can meet the operational requirement of the optical elements.
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异形构件在梁整形系统中的制造
为了实现非球面柱面镜的高精度加工,解决该领域的难题,对非球面柱面镜的加工和检测方法进行了深入的研究。采用经典和现代加工方法,制作了由非球面柱面镜和柱面镜组成的光束整形系统奇形部件。针对抛光盘表面形状难以控制的问题,提出了一种独特的抛光盘生产方法。结果表明,表面误差为0。848 7μm通过轮廓仪检测,可以满足光学元件的操作要求。
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