Processing and characterization of samarium and manganese modified lead titanate thin film

C. Fan, W. Huebner
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Abstract

Samarium and manganese modified lead titanate thin films were fabricated by spin-coating an amorphous citrate precursor. These films transformed into an oxide film upon heat treatment at 400/spl deg/C or above. Relatively large area and crack-free thin films could be obtained by this process both easily and inexpensively. The rheological behavior of the precursor solution, as well as its thermal decomposition and phase development were studied by means of DSC/TGA and XRD. The thickness and grain size of the oxide film were examined by TEM and SEM.
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钐锰改性钛酸铅薄膜的制备与表征
以无定形柠檬酸盐为前驱体,采用自旋涂覆法制备了钐锰改性钛酸铅薄膜。这些薄膜在400°C或更高的温度下热处理后转变成氧化膜。该方法可制备面积较大、无裂纹的薄膜,制备方法简单,成本低。采用DSC/TGA和XRD研究了前驱体溶液的流变行为、热分解和相发育过程。采用透射电镜和扫描电镜对氧化膜的厚度和晶粒尺寸进行了表征。
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