High-sensitivity erectrochemical sensor using pyrolyzed polymer-gold 3D probe arrays for spatial chemical sensing

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI:10.1109/MEMSYS.2013.6474419

W. Tonomura, Y. Mori, S. Konishi

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Abstract

This paper reports spatially arranged pyrolyzed polymer-gold probes to allow high-sensitivity monitoring of spatially distributed chemicals. Pyrolyzed polymer is a promising carbon material for applications of electrochemical sensors. Out-of-plane gold microelectrodes coated by polymer film (parylene-C) are transformed to conductive carbon-gold materials by annealing at 1000°C for 2h in a vacuum chamber. 3D probe technology using wire bonding makes it possible to provide the spatially arranged microelectrodes. This paper demonstrates pyrolyzed polymer-gold 3D probes have high sensitivity and wider electrochemical potential window than typical electrochemical electrode materials such as gold to realize spatial chemical sensing.

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高灵敏度电化学传感器，采用热解聚合物-金三维探针阵列进行空间化学传感

本文报道了一种空间排列的热解聚合物金探针，可以对空间分布的化学物质进行高灵敏度监测。热解聚合物是一种很有前途的电化学传感器碳材料。在真空室中，在1000℃下退火2h，涂覆聚合物膜(聚苯乙烯-C)的面外金微电极转化为导电碳金材料。利用金属丝键合的三维探针技术可以提供空间排列的微电极。本文论证了热解聚合物-金三维探针比金等典型电化学电极材料具有更高的灵敏度和更宽的电化学电位窗口，可实现空间化学传感。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)

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