J. Gonzalez-Chavarri, I. Castro-Hurtado, G. Mandayo, E. Castaño
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引用次数: 1
Abstract
In this paper the direct growth of ZnO nanostructures onto a sensing device for benzene gas sensing is presented. This sensor consists in an alumina substrate with platinum interdigitated microelectrodes and a Pt heater. The nanostructure growth process is based on a vapor-liquid-solid method starting from a RF sputtered Zn thin film.