Kazunori Shinoda, Nobuya Miyoshi, H. Kobayashi, Y. Hanaoka, M. Izawa, K. Ishikawa, M. Hori
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期刊介绍：
Journal of Vacuum Science & Technology B emphasizes processing, measurement and phenomena associated with micrometer and nanometer structures and devices. Processing may include vacuum processing, plasma processing and microlithography among others, while measurement refers to a wide range of materials and device characterization methods for understanding the physics and chemistry of submicron and nanometer structures and devices.
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