Animesh Nanaware, Taylor Kranbuhl, Jesus Ching, Janice S. Chen, Xinye Chen, Qingsong Tu, Ke Du
A pneumatic controlled nanosieve device is demonstrated for the efficient capture and release of 15 nm quantum dots. This device consists of a 200 nm deep glass channel and a polydimethylsiloxane-based pneumatic pressure layer to enhance target capture. The fluid motion inside the nanosieve is studied by computational fluidic dynamics (CFD) and microfluidic experiments, enabling efficient target capture with a flow rate as high as 100 μl/min. In addition, microgrooves are fabricated inside the nanosieve to create low flow rate regions, which further improves the target capture efficiency. A velocity contour plot is constructed with CFD, revealing that the flow rate is the lowest at the top and bottom of the microgrooves. This phenomenon is supported by the observed nanoparticle clusters surrounding the microgrooves. By changing the morphology and pneumatic pressure, this device will also facilitate rapid capture and release of various biomolecules.
{"title":"Pneumatic controlled nanosieve for efficient capture and release of nanoparticles","authors":"Animesh Nanaware, Taylor Kranbuhl, Jesus Ching, Janice S. Chen, Xinye Chen, Qingsong Tu, Ke Du","doi":"10.1116/6.0002107","DOIUrl":"https://doi.org/10.1116/6.0002107","url":null,"abstract":"A pneumatic controlled nanosieve device is demonstrated for the efficient capture and release of 15 nm quantum dots. This device consists of a 200 nm deep glass channel and a polydimethylsiloxane-based pneumatic pressure layer to enhance target capture. The fluid motion inside the nanosieve is studied by computational fluidic dynamics (CFD) and microfluidic experiments, enabling efficient target capture with a flow rate as high as 100 <i>μ</i>l/min. In addition, microgrooves are fabricated inside the nanosieve to create low flow rate regions, which further improves the target capture efficiency. A velocity contour plot is constructed with CFD, revealing that the flow rate is the lowest at the top and bottom of the microgrooves. This phenomenon is supported by the observed nanoparticle clusters surrounding the microgrooves. By changing the morphology and pneumatic pressure, this device will also facilitate rapid capture and release of various biomolecules.","PeriodicalId":17495,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"178 1","pages":""},"PeriodicalIF":1.4,"publicationDate":"2022-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"138519589","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Michael J. Elowson, R. Dhall, A. Schwartzberg, Stephanie Y. Chang, Vittoria Tommasini, S. B. Alam, E. Chan, S. Cabrini, S. Aloni
{"title":"Fabrication of ultrathin suspended membranes from atomic layer deposition films","authors":"Michael J. Elowson, R. Dhall, A. Schwartzberg, Stephanie Y. Chang, Vittoria Tommasini, S. B. Alam, E. Chan, S. Cabrini, S. Aloni","doi":"10.1116/6.0001309","DOIUrl":"https://doi.org/10.1116/6.0001309","url":null,"abstract":"","PeriodicalId":17495,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"27 1","pages":""},"PeriodicalIF":1.4,"publicationDate":"2022-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86696175","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Xinghua Sun, Y. Mignot, Christopher Cole, E. Liu, Daniel Santos, Angélique Raley, Jennifer Church, Luciana Meli, S. Sieg, P. Biolsi
{"title":"In-depth feasibility study of extreme ultraviolet damascene extension: Patterning, dielectric etch, and metallization","authors":"Xinghua Sun, Y. Mignot, Christopher Cole, E. Liu, Daniel Santos, Angélique Raley, Jennifer Church, Luciana Meli, S. Sieg, P. Biolsi","doi":"10.1116/6.0001671","DOIUrl":"https://doi.org/10.1116/6.0001671","url":null,"abstract":"","PeriodicalId":17495,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"9 1","pages":""},"PeriodicalIF":1.4,"publicationDate":"2022-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84197800","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Kazunori Shinoda, Nobuya Miyoshi, H. Kobayashi, Y. Hanaoka, M. Izawa, K. Ishikawa, M. Hori
{"title":"Plasma-assisted thermal-cyclic atomic-layer etching of tungsten and control of its selectivity to titanium nitride","authors":"Kazunori Shinoda, Nobuya Miyoshi, H. Kobayashi, Y. Hanaoka, M. Izawa, K. Ishikawa, M. Hori","doi":"10.1116/6.0001660","DOIUrl":"https://doi.org/10.1116/6.0001660","url":null,"abstract":"","PeriodicalId":17495,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"43 1","pages":""},"PeriodicalIF":1.4,"publicationDate":"2022-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84132706","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Nanofabrication can help us to emulate natural intelligence. Forward-engineering brain gained enormous momentum but still falls short in human neurodegenerative disease modeling. Here, organ-on-chip (OoC) implementation of tissue culture concepts in microfluidic formats already progressed with the identification of our knowledge gap in toxicology and drug metabolism studies. We believe that the self-organization of stem cells and chip technology is a key to advance such complex in vitro tissue models, including models of the human nervous system as envisaged in this review. However, current cultured networks of neurons show limited resemblance with the biological functions in the real nervous system or brain tissues. To take full advantage of scaling in the engineering domain of electron-, ion-, and photon beam technology and nanofabrication methods, more research is needed to meet the requirements of this specific field of chip technology applications. So far, surface topographies, microfluidics, and sensor and actuator integration concepts have all contributed to the patterning and control of neural network formation processes in vitro. However, when probing the state of the art for this type of miniaturized three-dimensional tissue models in PubMed, it was realized that there is very little systematic cross-disciplinary research with biomaterials originally formed for tissue engineering purposes translated to on-chip solutions for in vitro modeling. Therefore, this review contributes to the formulation of a sound design concept based on the understanding of the existing knowledge and the technical challenges toward finding better treatments and potential cures for devastating neurodegenerative diseases, like Parkinson's disease. Subsequently, an integration strategy based on a modular approach is proposed for nervous system-on-chip (NoC) models that can yield efficient and informative optical and electronic NoC readouts in validating and optimizing these conceptual choices in the innovative process of a fast growing and exciting new OoC industry.
{"title":"Nanofabricating neural networks: Strategies, advances, and challenges","authors":"R. Luttge","doi":"10.1116/6.0001649","DOIUrl":"https://doi.org/10.1116/6.0001649","url":null,"abstract":"Nanofabrication can help us to emulate natural intelligence. Forward-engineering brain gained enormous momentum but still falls short in human neurodegenerative disease modeling. Here, organ-on-chip (OoC) implementation of tissue culture concepts in microfluidic formats already progressed with the identification of our knowledge gap in toxicology and drug metabolism studies. We believe that the self-organization of stem cells and chip technology is a key to advance such complex in vitro tissue models, including models of the human nervous system as envisaged in this review. However, current cultured networks of neurons show limited resemblance with the biological functions in the real nervous system or brain tissues. To take full advantage of scaling in the engineering domain of electron-, ion-, and photon beam technology and nanofabrication methods, more research is needed to meet the requirements of this specific field of chip technology applications. So far, surface topographies, microfluidics, and sensor and actuator integration concepts have all contributed to the patterning and control of neural network formation processes in vitro. However, when probing the state of the art for this type of miniaturized three-dimensional tissue models in PubMed, it was realized that there is very little systematic cross-disciplinary research with biomaterials originally formed for tissue engineering purposes translated to on-chip solutions for in vitro modeling. Therefore, this review contributes to the formulation of a sound design concept based on the understanding of the existing knowledge and the technical challenges toward finding better treatments and potential cures for devastating neurodegenerative diseases, like Parkinson's disease. Subsequently, an integration strategy based on a modular approach is proposed for nervous system-on-chip (NoC) models that can yield efficient and informative optical and electronic NoC readouts in validating and optimizing these conceptual choices in the innovative process of a fast growing and exciting new OoC industry.","PeriodicalId":17495,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"78 1","pages":""},"PeriodicalIF":1.4,"publicationDate":"2022-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72914646","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
E. O. Popov, Sergey Filippov, A. G. Kolosko, A. Knápek
A study of single-tip tungsten emitters with the construction of current–voltage dependences in quadratic Fowler–Nordheim coordinates and modified coordinates (Murphy–Good plot that depend on the value of the work function) in real-time has been carried out. The statistical data on the value of the emission area and the field enhancement factor were accumulated. The statistical data on the voltage power in the pre-exponential factor were obtained by plotting the dependence of the notional emission area on the dimensionless field at the tip apex in the coordinates ln( Im/ Jk) versus ln( f). An empirical formula is proposed that uses a correction for the power of voltage, taking into account the shape of the tip.
{"title":"Comparison of the effective parameters of single-tip tungsten emitter using Fowler–Nordheim and Murphy–Good plots","authors":"E. O. Popov, Sergey Filippov, A. G. Kolosko, A. Knápek","doi":"10.1116/6.0001645","DOIUrl":"https://doi.org/10.1116/6.0001645","url":null,"abstract":"A study of single-tip tungsten emitters with the construction of current–voltage dependences in quadratic Fowler–Nordheim coordinates and modified coordinates (Murphy–Good plot that depend on the value of the work function) in real-time has been carried out. The statistical data on the value of the emission area and the field enhancement factor were accumulated. The statistical data on the voltage power in the pre-exponential factor were obtained by plotting the dependence of the notional emission area on the dimensionless field at the tip apex in the coordinates ln( Im/ Jk) versus ln( f). An empirical formula is proposed that uses a correction for the power of voltage, taking into account the shape of the tip.","PeriodicalId":17495,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"647 1","pages":""},"PeriodicalIF":1.4,"publicationDate":"2022-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85360240","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Gate offset and emitter design effects of triode cold cathode electron beams on focal spot sizes for x-ray imaging techniques","authors":"Y. Yu, K. Park","doi":"10.1116/6.0001588","DOIUrl":"https://doi.org/10.1116/6.0001588","url":null,"abstract":"","PeriodicalId":17495,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"47 1","pages":""},"PeriodicalIF":1.4,"publicationDate":"2022-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85533710","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
M. Choueib, A. Derouet, P. Vincent, A. Ayari, S. Perisanu, P. Poncharal, Costel Sorin Cojocaru, R. Martel, S. Purcell
{"title":"Negative differential resistance in photoassisted field emission from Si nanowires","authors":"M. Choueib, A. Derouet, P. Vincent, A. Ayari, S. Perisanu, P. Poncharal, Costel Sorin Cojocaru, R. Martel, S. Purcell","doi":"10.1116/6.0001650","DOIUrl":"https://doi.org/10.1116/6.0001650","url":null,"abstract":"","PeriodicalId":17495,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"414 1","pages":""},"PeriodicalIF":1.4,"publicationDate":"2022-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75785810","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
K. Jensen, M. McDonald, Mia K. Dhillon, Daniel Finkenstadt, A. Shabaev, M. Osofsky
{"title":"Thermal-field emission from cones and wires","authors":"K. Jensen, M. McDonald, Mia K. Dhillon, Daniel Finkenstadt, A. Shabaev, M. Osofsky","doi":"10.1116/6.0001656","DOIUrl":"https://doi.org/10.1116/6.0001656","url":null,"abstract":"","PeriodicalId":17495,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"33 1","pages":""},"PeriodicalIF":1.4,"publicationDate":"2022-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81571865","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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