In-depth feasibility study of extreme ultraviolet damascene extension: Patterning, dielectric etch, and metallization

{"title":"In-depth feasibility study of extreme ultraviolet damascene extension: Patterning, dielectric etch, and metallization","authors":"Xinghua Sun, Y. Mignot, Christopher Cole, E. Liu, Daniel Santos, Angélique Raley, Jennifer Church, Luciana Meli, S. Sieg, P. Biolsi","doi":"10.1116/6.0001671","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":17495,"journal":{"name":"Journal of Vacuum Science & Technology B","volume":"9 1","pages":""},"PeriodicalIF":1.4000,"publicationDate":"2022-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Vacuum Science & Technology B","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1116/6.0001671","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}