Nanotool Feeding System for efficient nanomanipulation inside Electron Microscope

Abstract

Nanotool feeding system (NTFS) is presented for efficient nanomanipulation. We constructed a unique bio-nanomanipulation system inside an Environmental-SEM (E-SEM) using various nanotools, for example stiffness measurement nanotool, dual electrical nanoprobe, nanopicker, nanofork, nanocutter, nanoputter, and nanoinjector. For continues usage of different multiple tools, it needs to exchange the nanotools continuously. In this paper, the Rotary-table Nanotool Feeding System (R-NTFS) is proposed to realize continuous exchange of different multiple tools individually. An efficient continuous nanomanipulation was achieved by a short exchange time which was about 13 seconds. Finally, the multiple nanoinjection was demonstrated using the proposed R-NTFS.