In Situ Thickness Measurements of a Silicon Wafer with a Deposited Thin Layer Using Multi-Reflected Terahertz Electromagnetic Waves Through Quartz Chamber Window
Dong-Woon Park, Gyung-Hwan Oh, Heon-Su Kim, Jindoo Choi, F. Righetti, J. Kang, Hak-Sung Kim
{"title":"In Situ Thickness Measurements of a Silicon Wafer with a Deposited Thin Layer Using Multi-Reflected Terahertz Electromagnetic Waves Through Quartz Chamber Window","authors":"Dong-Woon Park, Gyung-Hwan Oh, Heon-Su Kim, Jindoo Choi, F. Righetti, J. Kang, Hak-Sung Kim","doi":"10.1007/s10762-023-00919-0","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":16181,"journal":{"name":"Journal of Infrared, Millimeter, and Terahertz Waves","volume":"11 1","pages":"458 - 472"},"PeriodicalIF":1.8000,"publicationDate":"2023-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Infrared, Millimeter, and Terahertz Waves","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1007/s10762-023-00919-0","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
期刊介绍：
The Journal of Infrared, Millimeter, and Terahertz Waves offers a peer-reviewed platform for the rapid dissemination of original, high-quality research in the frequency window from 30 GHz to 30 THz. The topics covered include: sources, detectors, and other devices; systems, spectroscopy, sensing, interaction between electromagnetic waves and matter, applications, metrology, and communications.
Purely numerical work, especially with commercial software packages, will be published only in very exceptional cases. The same applies to manuscripts describing only algorithms (e.g. pattern recognition algorithms).
Manuscripts submitted to the Journal should discuss a significant advancement to the field of infrared, millimeter, and terahertz waves.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
