V. Bardinal, T. Camps, B. Reig, J. Doucet, S. Abada, E. Daran
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引用次数: 2
Abstract
We present our recent advances on design and fabrication of polymer optical MEMS that can be directly integrated on VCSELs arrays for dynamic beam focusing. These studies open new insights for the fabrication of compact optical sensors that require a real-time scan of laser beam position.
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