An Analysis of Beam Deflections in Poly-SiGe Cantilevers

微纳电子与智能制造 Pub Date : 2006-04-24 DOI:10.1109/ESIME.2006.1643974

M. Gonzalez, G. Van Barel, A. Witvrouw, B. Vandevelde

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引用次数: 1

Abstract

A predictive model for the deflection and profile of poly-SiGe beams for different thicknesses and geometries was evaluated. This model combines experimental data and finite element analysis (FEA). The structure employed to derivate the stress gradient and to calibrate and test the FEA calculations is a cantilever beam with dimensions of 1 mm length, 100 mum width and 10 mum thickness. The stress gradient of the film is obtained by measuring the deflection of the cantilevers with different etch depths. The deflection of the beam was calculated initially using a 2D plane stress model. The influence of the clamping region on the deflection was studied by using a perfect clamped beam and compared with a beam clamped only at the bottom clamp interface. In the second case a "tilt" effect near the anchor was observed due to the average stress in the unreleased thin film. FEM has been successfully applied to calculate the deflection of SiGe cantilever beams. Extra information like the stress distribution after releasing, the effect of Poisson's ratio on the curvature of the beam and the effect of clamping on the deflection was investigated

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聚sige悬臂梁的梁挠度分析

建立了不同厚度和几何形状的多sige梁挠度和轮廓的预测模型。该模型结合了实验数据和有限元分析(FEA)。用于推导应力梯度并校准和测试有限元计算的结构是长度为1 mm，宽度为100 mm，厚度为10 mm的悬臂梁。通过测量不同刻蚀深度下悬臂梁的挠度，得到了薄膜的应力梯度。梁的挠度最初是使用二维平面应力模型计算的。采用完全夹紧梁研究了夹紧区域对挠度的影响，并与仅在底部夹紧界面夹紧的梁进行了比较。在第二种情况下，由于未释放薄膜的平均应力，在锚点附近观察到“倾斜”效应。本文成功地应用有限元法计算了SiGe悬臂梁的挠度。研究了释放后的应力分布、泊松比对梁曲率的影响以及夹紧对挠度的影响等附加信息

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