{"title":"Ferroelectric based microgyroscope for inertial measurement unit: Modeling and simulation","authors":"Z. Ozer, A. Mamedov, E. Ozbay","doi":"10.1109/ISAF.2012.6297779","DOIUrl":null,"url":null,"abstract":"This paper present the design and modeling of the micro-electromechanical systems (MEMS) on the ternary ferroelectric compounds (PZT and Ba<sub>x</sub>Sr<sub>1-x</sub>TiO<sub>3</sub>) based by using finite element model (FEM) simulation.","PeriodicalId":20497,"journal":{"name":"Proceedings of ISAF-ECAPD-PFM 2012","volume":"7 1","pages":"1-4"},"PeriodicalIF":0.0000,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of ISAF-ECAPD-PFM 2012","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISAF.2012.6297779","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This paper present the design and modeling of the micro-electromechanical systems (MEMS) on the ternary ferroelectric compounds (PZT and BaxSr1-xTiO3) based by using finite element model (FEM) simulation.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
