Electrostatic actuation of folded multi-graphene structure for nano-gripper

Abstract

This paper presents a electrostatic actuation of multi-graphene which was folded by nanomanipulation for novel nano-gripper application. The development design of multi-graphene was initially fabricated by focused ion beam (FIB) process. The nanomanipulation system was used for folding and electrostatic actuation inside a FESEM (Field Emission Scanning Electron Microscope). The movement of multi-graphene was confirmed by electrostatic forces. The actuation was evaluated depending on the applied voltages.