M. Nakajima, K. Kuwabara, Takako Ishihara, T. Sakata, M. Usui, N. Nemoto, E. Hashimoto, J. Yamaguchi, S. Uchiyama, Yoshito Jin
{"title":"A physical modeling and long-term measurement of tilting angle drift caused by dielectric surface charging in MEMS micromirrors","authors":"M. Nakajima, K. Kuwabara, Takako Ishihara, T. Sakata, M. Usui, N. Nemoto, E. Hashimoto, J. Yamaguchi, S. Uchiyama, Yoshito Jin","doi":"10.1109/OMN.2013.6659038","DOIUrl":null,"url":null,"abstract":"Dielectric charging of MEMS micromirrors causes tilt angle drift, which is a major reliability problem for telecom applications. In this paper, we propose a physical model of angle drift in a MEMS mirror system considering surface charge motion on dielectric oxide. Good agreement is obtained between the model calculation and experimental results, which suggest that angle drift can be predicted by the proposed model.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"1 1","pages":"19-20"},"PeriodicalIF":0.0000,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMN.2013.6659038","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5
Abstract
Dielectric charging of MEMS micromirrors causes tilt angle drift, which is a major reliability problem for telecom applications. In this paper, we propose a physical model of angle drift in a MEMS mirror system considering surface charge motion on dielectric oxide. Good agreement is obtained between the model calculation and experimental results, which suggest that angle drift can be predicted by the proposed model.
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