Hydrogen etching of the SiC(0001) surface at moderate temperature

Abstract

Hydrogen etching of a 4H-SiC(0001) surface at a moderate temperature of 1200 °C with molecular hydrogen gas was investigated to obtain enough flat and clean surface for large-scale high-quality epitaxial graphene synthesis. We found after a prolonged hydrogen etching that micro scratches, large depressions, and contaminations produced on the wafer in the manufacturing process disappeared and that a periodic array of atomic steps appeared, maintaining initial flat surface morphology. One hour of etching with a flow of 1.0 l/min was the optimum condition to obtain a flat and clean SiC surface in the present study. Using such surfaces, we were able to synthesize the so-called zero layer graphene by thermal annealing in ultrahigh vacuum.