{"title":"Optimization of a continuous hot embossing process for fabrication of micropyramid structures in thermoplastic sheets","authors":"L. Haponow, J. Kettle, J. Allsop","doi":"10.1116/6.0000551","DOIUrl":null,"url":null,"abstract":"Reported is the manufacture and optimization of inverted micropyramid cavity structures into thermoplastic sheets using roll-to-roll (R2R) embossing. To manufacture the master, an ultraprecision diamond machining method was applied to create seamless surface structures into a copper-coated hot embossing roller. Using the hot embossing process, the roller features were successfully transferred to 2 mm thick polymethyl methacrylate (PMMA) sheets. Optimization of the R2R control process variables was conducted using Taguchi's numerical methods, which showed the importance of the roller temperature for a successful pattern transfer. The work presents a novel fabrication technique that allows microstructures to be manufactured into thick PMMA sheets in a continuous process.","PeriodicalId":17652,"journal":{"name":"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena","volume":"30 1","pages":"012203"},"PeriodicalIF":0.0000,"publicationDate":"2021-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1116/6.0000551","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 6
Abstract
Reported is the manufacture and optimization of inverted micropyramid cavity structures into thermoplastic sheets using roll-to-roll (R2R) embossing. To manufacture the master, an ultraprecision diamond machining method was applied to create seamless surface structures into a copper-coated hot embossing roller. Using the hot embossing process, the roller features were successfully transferred to 2 mm thick polymethyl methacrylate (PMMA) sheets. Optimization of the R2R control process variables was conducted using Taguchi's numerical methods, which showed the importance of the roller temperature for a successful pattern transfer. The work presents a novel fabrication technique that allows microstructures to be manufactured into thick PMMA sheets in a continuous process.