{"title":"Crystallographic and eigenmode dependence of TCf for single crystal silicon contour mode resonators","authors":"H. Zhu, G. Shan, Cheng Tu, Joshua E-Y Lee","doi":"10.1109/MEMSYS.2013.6474354","DOIUrl":null,"url":null,"abstract":"This paper reports the effects of crystal orientations on the temperature coefficient of frequency (TCf) of single crystal silicon square-plate micromechanical resonators vibrating in two distinct contour modes: Lamé mode and square extensional (SE). For the Lamé mode, the same TCf was found over several devices aligned to the <;110> direction, while much greater variation in the TCf was observed among the devices aligned against the <;100> direction. For the SE mode, the devices in both <;100> and <;110> orientations exhibit similar TCf values for varying doping levels. These observations are supported by Keyes' theory and close agreement between experiments and simulations is shown.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2013.6474354","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5
Abstract
This paper reports the effects of crystal orientations on the temperature coefficient of frequency (TCf) of single crystal silicon square-plate micromechanical resonators vibrating in two distinct contour modes: Lamé mode and square extensional (SE). For the Lamé mode, the same TCf was found over several devices aligned to the <;110> direction, while much greater variation in the TCf was observed among the devices aligned against the <;100> direction. For the SE mode, the devices in both <;100> and <;110> orientations exhibit similar TCf values for varying doping levels. These observations are supported by Keyes' theory and close agreement between experiments and simulations is shown.
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