А. И. Охапкин, М. Н. Дроздов, П.А. Юнин, С.А. Краев, Д.Б. Радищев
{"title":"Плазмохимическое осаждение гидрогенизованных пленок DLC с различным содержанием водорода и sp-=SUP=-3-=/SUP=--гибридного углерода","authors":"А. И. Охапкин, М. Н. Дроздов, П.А. Юнин, С.А. Краев, Д.Б. Радищев","doi":"10.21883/ftp.2023.05.56195.09k","DOIUrl":null,"url":null,"abstract":"The influence of methane plasma parameters on the deposition rate and on the content of the hydrogen and the sp3-carbon fraction in hydrogenated diamond-like carbon films (DLC) was investigated. It was shown that the proportion of the sp3-carbon fraction mainly depends on the inductive power and the argon addition to the plasma; the latter also contributes to a decrease of hydrogen in the films.","PeriodicalId":24054,"journal":{"name":"Физика и техника полупроводников","volume":"128 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2023-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Физика и техника полупроводников","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.21883/ftp.2023.05.56195.09k","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
The influence of methane plasma parameters on the deposition rate and on the content of the hydrogen and the sp3-carbon fraction in hydrogenated diamond-like carbon films (DLC) was investigated. It was shown that the proportion of the sp3-carbon fraction mainly depends on the inductive power and the argon addition to the plasma; the latter also contributes to a decrease of hydrogen in the films.
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