DC and AC electrothermal charicterization of heated microcantilevers using scanning thermoreflectance microscopy

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI:10.1109/MEMSYS.2013.6474265

Joohyun Kim, Sunwoo Han, Keunhan Park, Bong-Jae Lee, W. King, Jungchul Lee

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Abstract

We report the application of scanning thermoreflectance microscopy for steady - as well as periodic-temperature calibration of a microheater-integrated atomic force microscope cantilever (or heated microcantilever). While the heated microcantilever was operated with either DC or AC powers, local thermoreflectance signals were measured using a home-built scanning thermoreflectance microscope and converted into local temperatures using a calibration with Raman thermometry. For our scanning thermoreflectance microscopy, temporal resolution of 10 μs and spatial resolution of 2 μm were achieved. The shrinkage of the AC temperature oscillation amplitude was observed as the modulation frequency increased and thermal cut-off frequency near 1 kHz was found. In addition, strong thickness-dependent thermoreflectance signals were experimentally confirmed and might be useful for noncontact thickness measurements of free standing microelectromechanical systems devices having uniform temperatures.

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用扫描热反射显微镜研究加热微悬臂梁的直流和交流电热特性

我们报告了扫描热反射显微镜在微加热器集成原子力显微镜悬臂梁(或加热微悬臂梁)的稳定和周期性温度校准中的应用。加热后的微悬臂在直流或交流电源下工作时，使用自制的扫描热反射显微镜测量局部热反射信号，并使用拉曼测温校准将其转换为局部温度。扫描热反射显微镜的时间分辨率为10 μs，空间分辨率为2 μs。随着调制频率的增加，交流温度振荡幅度减小，热截止频率接近1 kHz。此外，强厚度相关的热反射信号被实验证实，可能对具有均匀温度的独立式微机电系统设备的非接触厚度测量有用。

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2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)

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