{"title":"Microbridge preparation through spincoating and photolithography without etching","authors":"F. Zygalsky, I. Von Lampe, S. Götze","doi":"10.1016/S0964-1807(99)00044-7","DOIUrl":null,"url":null,"abstract":"<div><p><span><span><span>It is possible to produce HTSC<span> thin films of polymer </span></span>metal precursors by the simple spincoating technique. This method can be used to manufacture of Y–Ba–Cu–O- and Bi–Sr–Ca–Cu–O–HTSC thin films. The microbridges are generated into the precursor film by </span>photolithography. The etching process step is cancelled. After that the superconducting phases are formed at 950°C respectively 865°C during the tempering process. The HTSC structures serve as a previous stage for SNS contact. The critical temperatures (</span><em>T</em><sub>c</sub>) measured on the 20 and 200<!--> <em>μ</em>m wide microbridges are 82<!--> <!-->K for Y–Ba–Cu–O and 108<!--> <!-->K for Bi–Sr–Ca–Cu–O. The critical current density (<em>j</em><sub>c</sub>) obtained is 10<sup>5</sup> A/cm<sup>2</sup> for 65<!--> <!-->K.</p></div>","PeriodicalId":100110,"journal":{"name":"Applied Superconductivity","volume":"6 10","pages":"Pages 795-798"},"PeriodicalIF":0.0000,"publicationDate":"1999-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/S0964-1807(99)00044-7","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Applied Superconductivity","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0964180799000447","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
It is possible to produce HTSC thin films of polymer metal precursors by the simple spincoating technique. This method can be used to manufacture of Y–Ba–Cu–O- and Bi–Sr–Ca–Cu–O–HTSC thin films. The microbridges are generated into the precursor film by photolithography. The etching process step is cancelled. After that the superconducting phases are formed at 950°C respectively 865°C during the tempering process. The HTSC structures serve as a previous stage for SNS contact. The critical temperatures (Tc) measured on the 20 and 200 μm wide microbridges are 82 K for Y–Ba–Cu–O and 108 K for Bi–Sr–Ca–Cu–O. The critical current density (jc) obtained is 105 A/cm2 for 65 K.