Microbridge preparation through spincoating and photolithography without etching

F. Zygalsky, I. Von Lampe, S. Götze
{"title":"Microbridge preparation through spincoating and photolithography without etching","authors":"F. Zygalsky,&nbsp;I. Von Lampe,&nbsp;S. Götze","doi":"10.1016/S0964-1807(99)00044-7","DOIUrl":null,"url":null,"abstract":"<div><p><span><span><span>It is possible to produce HTSC<span> thin films of polymer </span></span>metal precursors by the simple spincoating technique. This method can be used to manufacture of Y–Ba–Cu–O- and Bi–Sr–Ca–Cu–O–HTSC thin films. The microbridges are generated into the precursor film by </span>photolithography. The etching process step is cancelled. After that the superconducting phases are formed at 950°C respectively 865°C during the tempering process. The HTSC structures serve as a previous stage for SNS contact. The critical temperatures (</span><em>T</em><sub>c</sub>) measured on the 20 and 200<!--> <em>μ</em>m wide microbridges are 82<!--> <!-->K for Y–Ba–Cu–O and 108<!--> <!-->K for Bi–Sr–Ca–Cu–O. The critical current density (<em>j</em><sub>c</sub>) obtained is 10<sup>5</sup> A/cm<sup>2</sup> for 65<!--> <!-->K.</p></div>","PeriodicalId":100110,"journal":{"name":"Applied Superconductivity","volume":"6 10","pages":"Pages 795-798"},"PeriodicalIF":0.0000,"publicationDate":"1999-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/S0964-1807(99)00044-7","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Applied Superconductivity","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0964180799000447","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3

Abstract

It is possible to produce HTSC thin films of polymer metal precursors by the simple spincoating technique. This method can be used to manufacture of Y–Ba–Cu–O- and Bi–Sr–Ca–Cu–O–HTSC thin films. The microbridges are generated into the precursor film by photolithography. The etching process step is cancelled. After that the superconducting phases are formed at 950°C respectively 865°C during the tempering process. The HTSC structures serve as a previous stage for SNS contact. The critical temperatures (Tc) measured on the 20 and 200 μm wide microbridges are 82 K for Y–Ba–Cu–O and 108 K for Bi–Sr–Ca–Cu–O. The critical current density (jc) obtained is 105 A/cm2 for 65 K.

查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
通过纺丝涂层和光刻技术制备微桥,无需蚀刻
用简单的旋涂技术制备高分子金属前驱体HTSC薄膜是可能的。该方法可用于制备Y-Ba-Cu-O -薄膜和Bi-Sr-Ca-Cu-O-HTSC薄膜。微桥通过光刻技术生成前驱体膜。取消了蚀刻工艺步骤。然后在950℃回火形成超导相,分别在865℃回火。HTSC结构是SNS接触的前一个阶段。在20 μm和200 μm宽的微桥上,Y-Ba-Cu-O的临界温度为82 K, Bi-Sr-Ca-Cu-O的临界温度为108 K。在65k下得到的临界电流密度(jc)为105 A/cm2。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Raw data and analysis pipeline for producing figures in F.W. Carter, et. al., 2016 Review and evaluation of methods for application of epitaxial buffer and superconductor layers1 10 K NbN ADC for IR sensor applications Optically-induced effects in Y–ba–cu–O Josephson junctions Cell-library design methodology for integrated RSFQ-logic
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1