M. Gromova, L. Haspeslagh, A. Verbist, B. du Bois, R. Van Hoof, B. Eyckens, B. Sijmus, I. De Wolf, V. Simons, P. Mutter, T. Lauwagie, M. Willegems, S. Locorotondo, W. Boullart, K. Baert, A. Witvrouw
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引用次数: 12
Abstract
This paper presents very reliable and stable micro- mirrors made of hydrogenated microcrystalline SiGe (muc-SiGe:H) at temperatures that would allow processing above standard CMOS circuitry. Very flat micro-mirrors with sizes ranging between 7.5 x 7.5 and 16 x 16 mum2 size and submicron hinges are fabricated. No hinge creep is observed over a period of 20 days and no fatigue damage is seen after 5 x 1010 cycles.
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