Fabrication and Characterization of Hollow Microneedle Array Using Diffraction UV Lithography

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI:10.1109/Transducers50396.2021.9495599

Jun Ying Tan, Albert Kim, J. Kim

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引用次数: 3

Abstract

Hollow microneedles are extremely attractive to drug delivery domains with high demands from clinics and industry. However, its complicated fabrication processes have impeded its wide adoption. This paper presents a simple one-step fabrication method for hollow microneedles based on diffraction UV lithography and solid-liquid light propagation. The fabrication process utilizes bottom-up exposure of a liquid photosensitive resin through photomask patterns comprising a plurality of apertures. Hollow microneedles with various heights were fabricated in a range of 400 µm to 600 µm from a few minutes of UV exposure. The fabricated hollow microneedles were characterized with force-displacement tests showing a good tip strength of 0.35 N per single unit. A hollow fluidic test on a pig cadaver skin showed great potential for drug delivery. Also, batch fabrication with multiple height microneedles on a single substrate has demonstrated compatibility with the manufacturing process.

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用衍射紫外光刻技术制备空心微针阵列及表征

空心微针在临床和工业用药领域具有很高的应用价值。然而，其复杂的制造工艺阻碍了其广泛应用。本文提出了一种基于衍射紫外光刻和固液光传播的简单一步制备空心微针的方法。制造工艺利用液体光敏树脂通过包含多个孔的掩模模式自下而上地曝光。经过几分钟的紫外线照射，在400µm到600µm的范围内制造出各种高度的空心微针。通过力-位移试验对所制备的空心微针进行了表征，其尖端强度达到0.35 N /单。在猪尸体皮肤上进行的空心流体试验显示出很大的药物输送潜力。此外，在单一基板上使用多高度微针的批量制造已经证明了与制造工艺的兼容性。

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2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

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