Ga-contamination-free scanning transmission electron microscope sample preparation by rectangular-shaped oxygen-ion-beam thinning using projection ion beam optical system

Abstract

Rectangular-shaped oxygen O2+ ion beam thinning for scanning transmission electron microscope (STEM) sample preparation was investigated using a projection ion beam optical system equipped with a duoplasmatron gas ion source. The ion current can be increased by increasing the area of the rectangular-shaped oxygen ion beam and thereby overcome the low brightness of the ion source. Rectangular-shaped O2+ ion beams with different amounts of projection beam edge blur were formed in the X and Y directions by using a limiting mask between the ion source and projection mask. Gallium-contamination-free STEM sample preparation (rough, medium, and fine milling) was demonstrated using a projection ion beam optical system and three types of rectangular-shaped oxygen ion beams.