{"title":"Magnetically actuated scanning microlens for NIR Raman spectroscopy","authors":"Chin-Pang-Billy Siu, H. Zeng, M. Chiao","doi":"10.1109/MEMSYS.2007.4433127","DOIUrl":null,"url":null,"abstract":"This paper presents the design, fabrication and characterization of a magnetically actuated scanning microlens for miniature confocal near infrared (NIR) Raman spectroscopy. One of the potential applications could be on non-invasive skin cancer diagnosis. The microlens is comprised of a 20 mum thick ferromagnetic nickel platform integrated with a PDMS plano-convex lens with a diameter of 1.25 mm and an effective focal length of 2.0 mm. This work demonstrates a microlens with a scanning angle of plusmn24deg driven by an external AC magnetic field orientated at an angle of 30deg from the horizontal rotation axis. A coplanar 152 mum scanning range is demonstrated by a 22.2times10-3 Tesla external magnetic field at 197 Hz.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"39 1","pages":"735-738"},"PeriodicalIF":0.0000,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2007.4433127","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
This paper presents the design, fabrication and characterization of a magnetically actuated scanning microlens for miniature confocal near infrared (NIR) Raman spectroscopy. One of the potential applications could be on non-invasive skin cancer diagnosis. The microlens is comprised of a 20 mum thick ferromagnetic nickel platform integrated with a PDMS plano-convex lens with a diameter of 1.25 mm and an effective focal length of 2.0 mm. This work demonstrates a microlens with a scanning angle of plusmn24deg driven by an external AC magnetic field orientated at an angle of 30deg from the horizontal rotation axis. A coplanar 152 mum scanning range is demonstrated by a 22.2times10-3 Tesla external magnetic field at 197 Hz.
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