An InAlAs/InAs MODFET

C. C. Eugster, T.P.E. Broekaert, J. A. D. Alamo, Clifton G. Fonstad
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引用次数: 19

Abstract

The fabrication and testing of an InAs modulation-doped field-effect transistor (MODFET) using an epitaxial heterostructure based entirely on arsenides are discussed. The heterostructure was grown by molecular beam epitaxy (MBE) on InP and contains a 30 A InAs channel. An L/sub G/=2 mu m device displays well behaved characteristics, showing sharp pinch-off (V/sub th/=-0.8 V) and small output conductance (5 mS/mm) at 300 K. The maximum transconductance is 170 mS/mm with a maximum drain current of 312 mA/mm. Strong channel quantization results in breakdown voltage of -9.6 V, a severalfold improvement over previous InAs MODFETs based on antimonides. Low-temperature magnetic field measurements show strong Shubnikov-de Haas oscillations from which the electron channel is confirmed to be the InAs layer.<>
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InAlAs/InAs MODFET
讨论了一种完全基于砷化物的外延异质结构的掺砷化铟调制场效应晶体管(MODFET)的制备和测试。该异质结构通过分子束外延(MBE)在InP上生长,并包含一个30 a的InAs通道。L/sub / G =2 μ m器件在300 K时表现出尖锐的断路(V/sub /=-0.8 V)和小的输出电导(5 mS/mm)。最大跨导为170 mS/mm,最大漏极电流为312 mA/mm。强通道量化导致击穿电压为-9.6 V,比以前基于锑化物的InAs modfet提高了几倍。低温磁场测量显示出强烈的舒布尼科夫-德哈斯振荡,由此电子通道被确认为InAs层。
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