H. Ogiso, K. Yukimura, S. Nakano, Hiroyuki Tanaka, S. Khumpuang, Yuuki Yabuta, Ryuichiro Kamei, S. Hara
{"title":"Development of Miniature Sputtering Deposition Equipment for Minimal Fab with HiPIMS Operations","authors":"H. Ogiso, K. Yukimura, S. Nakano, Hiroyuki Tanaka, S. Khumpuang, Yuuki Yabuta, Ryuichiro Kamei, S. Hara","doi":"10.3131/JVSJ2.60.365","DOIUrl":null,"url":null,"abstract":"Development of Miniature Sputtering Deposition Equipment for Minimal Fab with HiPIMS Operations Hisato OGISO1, Ken YUKIMURA2, Shizuka NAKANO1, Hiroyuki TANAKA2, Sommawan KHUMPUANG2, Yuuki YABUTA3, Ryuichiro KAMEI3 and Shiro HARA2 1Advanced Manufacturing Research Institute, National Institute of Industrial Science and Technology (AIST), 121 Namiki, Tsukuba-shi, Ibaraki 3058564 Japan 2Nanoelectronics Research Institute, National Institute of Industrial Science and Technology (AIST), 111 Umezono, Tsukuba-shi, Ibaraki 3058568, Japan 3Seinan-kogyo Co., Ltd., 4324 Kitakagaya, Summinoe-ku, Osaka-shi, Osaka 5590011 Japan","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"128 1","pages":"365-371"},"PeriodicalIF":0.0000,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of The Vacuum Society of Japan","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.3131/JVSJ2.60.365","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Development of Miniature Sputtering Deposition Equipment for Minimal Fab with HiPIMS Operations Hisato OGISO1, Ken YUKIMURA2, Shizuka NAKANO1, Hiroyuki TANAKA2, Sommawan KHUMPUANG2, Yuuki YABUTA3, Ryuichiro KAMEI3 and Shiro HARA2 1Advanced Manufacturing Research Institute, National Institute of Industrial Science and Technology (AIST), 121 Namiki, Tsukuba-shi, Ibaraki 3058564 Japan 2Nanoelectronics Research Institute, National Institute of Industrial Science and Technology (AIST), 111 Umezono, Tsukuba-shi, Ibaraki 3058568, Japan 3Seinan-kogyo Co., Ltd., 4324 Kitakagaya, Summinoe-ku, Osaka-shi, Osaka 5590011 Japan
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
