Sumit Kumar, E. Abraham, S. Talukder, Praveen Kumar, R. Pratap
{"title":"Micro Electrolithography System Development","authors":"Sumit Kumar, E. Abraham, S. Talukder, Praveen Kumar, R. Pratap","doi":"10.1109/icee44586.2018.8937922","DOIUrl":null,"url":null,"abstract":"The recently developed technique of micro-nano pattern drawing by electrolithography process necessitates controlled probe-tip movement on a predefined path. Here we report development of a specific micropositioner system for drawing patterns at micrometer scale. Effect of different parameters on the patterns is studied. Probe-tip velocity and tip force are found to have major impact on the pattern-dimension.","PeriodicalId":6590,"journal":{"name":"2018 4th IEEE International Conference on Emerging Electronics (ICEE)","volume":"16 1","pages":"1-4"},"PeriodicalIF":0.0000,"publicationDate":"2018-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 4th IEEE International Conference on Emerging Electronics (ICEE)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/icee44586.2018.8937922","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
The recently developed technique of micro-nano pattern drawing by electrolithography process necessitates controlled probe-tip movement on a predefined path. Here we report development of a specific micropositioner system for drawing patterns at micrometer scale. Effect of different parameters on the patterns is studied. Probe-tip velocity and tip force are found to have major impact on the pattern-dimension.
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