{"title":"Atmospheric Pressure Linear Microwave Plasma for Surface Treatment of Materials","authors":"H. Shindo, H. Kuwahata, M. Isomura","doi":"10.3131/JVSJ2.60.105","DOIUrl":null,"url":null,"abstract":"Atmospheric pressure plasma is a powerful tool for various material processing. In this article, development of atmospheric pressure plasmas are reviewed, particularly for glow-like plasma which is characterized by spreading in space and has an advantage applicable to surface treatment. One important issue in application of atmospheric pressure plasma is a large area processing, and as one candidate for the purpose, line-shaped microwave plasma in atmospheric pressure is also reviewed.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of The Vacuum Society of Japan","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.3131/JVSJ2.60.105","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
Atmospheric pressure plasma is a powerful tool for various material processing. In this article, development of atmospheric pressure plasmas are reviewed, particularly for glow-like plasma which is characterized by spreading in space and has an advantage applicable to surface treatment. One important issue in application of atmospheric pressure plasma is a large area processing, and as one candidate for the purpose, line-shaped microwave plasma in atmospheric pressure is also reviewed.
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