{"title":"Modeling the Electromechanical Response of RF-MEMS Switches","authors":"D. Elata","doi":"10.1109/ESIME.2006.1644058","DOIUrl":null,"url":null,"abstract":"In this work systematic approaches for extracting parameters of the static and dynamic response of electrostatic switches are presented. A novel strategy enables accurate and efficient extraction of the static pull-in state of voltage and charge driven actuators. Another strategy enables to extract parameters of the dynamic pull-in while only considering static states of the system","PeriodicalId":60796,"journal":{"name":"微纳电子与智能制造","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2006-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"微纳电子与智能制造","FirstCategoryId":"1087","ListUrlMain":"https://doi.org/10.1109/ESIME.2006.1644058","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
In this work systematic approaches for extracting parameters of the static and dynamic response of electrostatic switches are presented. A novel strategy enables accurate and efficient extraction of the static pull-in state of voltage and charge driven actuators. Another strategy enables to extract parameters of the dynamic pull-in while only considering static states of the system
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