Electrical characterization of Si-doped conductive AlInN films grown nearly lattice-matched to c-plane GaN on sapphire by metalorganic chemical vapor deposition

Abstract

In this study, Si-doped conductive AlInN films with a thickness of 300 nm were grown nearly lattice-matched to c-plane GaN-on-sapphire templates by metalorganic chemical vapor deposition. A high net donor concentration of approximately 1 × 1019 cm−3 was observed for a highly Si-doped AlInN film. To evaluate its vertical-direction electrical resistivity without being affected by polarization-induced carriers, the transfer length measurement (TLM) model was applied to two kinds of test element groups. By analyzing the TLM results, the vertical-direction resistivity of the 300-nm-thick n-type AlInN film was estimated to be 5.8 × 10−4 Ω cm2.