{"title":"An Ear-Inspired Sound Pressure Amplification Structure for Fabry-Perot Acoustic Sensor","authors":"Xi Xiao, Cheng Li, Shangchun Fan, Xuefeng Song","doi":"10.1109/Transducers50396.2021.9495434","DOIUrl":null,"url":null,"abstract":"In this paper, inspired by the ossicular chain in human middle ear, a miniature sound pressure amplification structure (SPAS) based on double $10\\ \\mu \\mathrm{m}$-thickness E-shaped steel diaphragms with the corresponding diameters of 15 mm and 3 mm was developed to enhance the sensitivity of diaphragm-type Fabry-Perot (F-P) acoustic sensor. FEM simulation demonstrated the availability of the SPAS in terms of the achieved acoustic field response within a certain frequency range. Then acoustic test showed that the F-P acoustic sensor using a silver diaphragm, adapted with the developed SPAS, achieved a remarkable sensitivity amplification ratio of up to ∼7.6 in the range of 1.5∼2.1 kHz, which can be further widened by optimizing structure dimensions and membrane materials.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"88 1","pages":"1174-1177"},"PeriodicalIF":0.0000,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/Transducers50396.2021.9495434","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
In this paper, inspired by the ossicular chain in human middle ear, a miniature sound pressure amplification structure (SPAS) based on double $10\ \mu \mathrm{m}$-thickness E-shaped steel diaphragms with the corresponding diameters of 15 mm and 3 mm was developed to enhance the sensitivity of diaphragm-type Fabry-Perot (F-P) acoustic sensor. FEM simulation demonstrated the availability of the SPAS in terms of the achieved acoustic field response within a certain frequency range. Then acoustic test showed that the F-P acoustic sensor using a silver diaphragm, adapted with the developed SPAS, achieved a remarkable sensitivity amplification ratio of up to ∼7.6 in the range of 1.5∼2.1 kHz, which can be further widened by optimizing structure dimensions and membrane materials.