An Ear-Inspired Sound Pressure Amplification Structure for Fabry-Perot Acoustic Sensor

Xi Xiao, Cheng Li, Shangchun Fan, Xuefeng Song
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Abstract

In this paper, inspired by the ossicular chain in human middle ear, a miniature sound pressure amplification structure (SPAS) based on double $10\ \mu \mathrm{m}$-thickness E-shaped steel diaphragms with the corresponding diameters of 15 mm and 3 mm was developed to enhance the sensitivity of diaphragm-type Fabry-Perot (F-P) acoustic sensor. FEM simulation demonstrated the availability of the SPAS in terms of the achieved acoustic field response within a certain frequency range. Then acoustic test showed that the F-P acoustic sensor using a silver diaphragm, adapted with the developed SPAS, achieved a remarkable sensitivity amplification ratio of up to ∼7.6 in the range of 1.5∼2.1 kHz, which can be further widened by optimizing structure dimensions and membrane materials.
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一种用于Fabry-Perot声传感器的耳式声压放大结构
为了提高膜片式法布里-珀罗(F-P)声传感器的灵敏度,本文以人类中耳听骨链为灵感,设计了一种基于10\ \mu \mathrm{m}$厚度、直径分别为15 mm和3 mm的双e形钢膜片的微型声压放大结构(SPAS)。有限元仿真结果表明,SPAS在一定频率范围内的声场响应是有效的。声学测试表明,采用银膜片的F-P声传感器在1.5 ~ 2.1 kHz范围内获得了高达7.6的灵敏度放大比,通过优化结构尺寸和膜材料可以进一步扩大。
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