Dong-Hui Zhao , Zheng-Hao Gu , Tian-Yu Wang , Xiao-Jiao Guo , Xi-Xi Jiang , Min Zhang , Hao Zhu , Lin Chen , Qing-Qing Sun , David Wei Zhang
{"title":"Sensitive MoS2 photodetector cell with high air-stability for multifunctional in-sensor computing","authors":"Dong-Hui Zhao , Zheng-Hao Gu , Tian-Yu Wang , Xiao-Jiao Guo , Xi-Xi Jiang , Min Zhang , Hao Zhu , Lin Chen , Qing-Qing Sun , David Wei Zhang","doi":"10.1016/j.chip.2022.100023","DOIUrl":null,"url":null,"abstract":"<div><p>With the development of artificial intelligence and the Internet of Things, the number of sensory nodes is growing rapidly, leading to the exchange of large quantities of redundant data between sensors and computing units. In-sensor computing schemes, which integrate sensing and processing, have provided a promising route to addressing the sensing/processing bottleneck by reducing power consumption, time delay and hardware redundancy. In this study, an in-sensor computing architecture involving a photoelectronic cell based on a wafer-scale two-dimensional MoS<sub>2</sub> thin film was demonstrated. The MoS<sub>2</sub> photodetector cell used a top-gate device structure with indium tin oxide (ITO) as the transparent gate electrode, which exhibited high air-stability and a high photoresponsivity (<em>R</em>) up to 555.8 A W<sup>–1</sup> at an illumination power density (<em>P</em><sub>in</sub>) of 16.0 µW cm<sup>–2</sup> (<em>λ</em> = 500 nm). Additionally, a MoS<sub>2</sub> photodetector array with uniform photoresponsive characteristics was achieved. Furthermore, logic gates, including inverter, NAND, and NOR, were achieved based on MoS<sub>2</sub> photodetector cells. Such multifunctional and robust in-sensor computing was ascribed to the uniform wafer-scale MoS<sub>2</sub> film grown by atomic layer deposition (ALD) and the unique device structure. Because the detection of optical signals and logic operations were achieved through MoS<sub>2</sub> photodetector cells with area efficiency, the proposed in-sensor computing device paves the way for potential applications in high-performance, integrated sensing and processing systems.</p></div>","PeriodicalId":100244,"journal":{"name":"Chip","volume":"1 3","pages":"Article 100023"},"PeriodicalIF":0.0000,"publicationDate":"2022-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2709472322000211/pdfft?md5=3e7ef961c3287c5bf266016512406081&pid=1-s2.0-S2709472322000211-main.pdf","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Chip","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S2709472322000211","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
With the development of artificial intelligence and the Internet of Things, the number of sensory nodes is growing rapidly, leading to the exchange of large quantities of redundant data between sensors and computing units. In-sensor computing schemes, which integrate sensing and processing, have provided a promising route to addressing the sensing/processing bottleneck by reducing power consumption, time delay and hardware redundancy. In this study, an in-sensor computing architecture involving a photoelectronic cell based on a wafer-scale two-dimensional MoS2 thin film was demonstrated. The MoS2 photodetector cell used a top-gate device structure with indium tin oxide (ITO) as the transparent gate electrode, which exhibited high air-stability and a high photoresponsivity (R) up to 555.8 A W–1 at an illumination power density (Pin) of 16.0 µW cm–2 (λ = 500 nm). Additionally, a MoS2 photodetector array with uniform photoresponsive characteristics was achieved. Furthermore, logic gates, including inverter, NAND, and NOR, were achieved based on MoS2 photodetector cells. Such multifunctional and robust in-sensor computing was ascribed to the uniform wafer-scale MoS2 film grown by atomic layer deposition (ALD) and the unique device structure. Because the detection of optical signals and logic operations were achieved through MoS2 photodetector cells with area efficiency, the proposed in-sensor computing device paves the way for potential applications in high-performance, integrated sensing and processing systems.
随着人工智能和物联网的发展,传感器节点数量快速增长,导致传感器与计算单元之间交换大量冗余数据。传感器内计算方案集成了传感和处理,通过降低功耗、时间延迟和硬件冗余,为解决传感/处理瓶颈提供了一条有前途的途径。在本研究中,展示了一种基于晶圆级二维二硫化钼薄膜的光电子电池的传感器内计算架构。MoS2光电探测器电池采用以氧化铟锡(ITO)为透明栅极的顶栅器件结构,在16.0µW cm-2 (λ = 500 nm)的照明功率密度(Pin)下,具有较高的空气稳定性和高达555.8 a W - 1的光响应率(R)。此外,还实现了具有均匀光响应特性的二硫化钼光电探测器阵列。此外,还实现了基于MoS2光电探测器单元的逻辑门,包括逆变器、NAND和NOR。这种多功能和鲁棒的传感器内计算归功于原子层沉积(ALD)生长的均匀晶圆级MoS2薄膜和独特的器件结构。由于光信号的检测和逻辑运算是通过具有面积效率的MoS2光电探测器单元实现的,因此所提出的传感器内计算设备为高性能集成传感和处理系统的潜在应用铺平了道路。