{"title":"A novel electromagnetic force method for micro/nano newton force measurement","authors":"Chongkai Zhou, Yanling Tian, Fujun Wang, Zhiyong Guo, Dawei Zhang","doi":"10.1109/3M-NANO.2017.8286287","DOIUrl":null,"url":null,"abstract":"Based on the electromagnetic actuator, a novel mechanical system is developed for the measurement of micro/nano newton force, as well as the deformation of the suspension mechanism. The system mainly includes the electromagnetic actuator, flexible suspension mechanism and displacement sensor. A null position measurement method for the suspension mechanism is introduced. The electromagnetic force is theoretically modeled and simulated in ANSYS Maxwell software to optimize the position of the magnet. And then, the suspension mechanism is simulated by Finite Element Analysis (FEA). According to the experimental results, the developed system has a current resolution 1mA, electromagnetic force conversion rate 400μN/mA, the stiffness 27.5N/m.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"24 1","pages":"40-45"},"PeriodicalIF":0.0000,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/3M-NANO.2017.8286287","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Based on the electromagnetic actuator, a novel mechanical system is developed for the measurement of micro/nano newton force, as well as the deformation of the suspension mechanism. The system mainly includes the electromagnetic actuator, flexible suspension mechanism and displacement sensor. A null position measurement method for the suspension mechanism is introduced. The electromagnetic force is theoretically modeled and simulated in ANSYS Maxwell software to optimize the position of the magnet. And then, the suspension mechanism is simulated by Finite Element Analysis (FEA). According to the experimental results, the developed system has a current resolution 1mA, electromagnetic force conversion rate 400μN/mA, the stiffness 27.5N/m.
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