A high performance CMOS compatible thermopile based on noise added mechanism

Abstract

Recently, a novel signal processing theory related to noise has grown and been proven. A new high performance thermopile based on the noise added scheme has been realized by an embedded heater for a CMOS compatible thermoelectric infrared sensor. Certain complex systems can improve performance with added optimal noise that classical theory cannot explain. To that end, we are using noise in a remote temperature sensing system to enhance its function without altering the system. Thermopile sensors are designed and fabricated using 1.2 /spl mu/m CMOS IC technology combined with a subsequent anisotropic front-side etching. We first develop an active thermopile with an embedded heater which is easily and naturally driven by a noise generation circuit. The stochastic resonance theory can be realized as a reduction in the temperature detection threshold. We have greatly improved the performance of the remote temperature sensing system in the presence of noise. Stochastic resonance can reduce threshold detection resolution and greatly improve the temperature detection limit with a low cost scheme without using a higher resolution ADC.