Shuichi Tajiri, T. Onishi, Yukiko Okano, S. Ogawa, H. Mima
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引用次数: 0
Abstract
Measurement of Steady State Pressure Distribution and Dynamic Pressure Fluctuations During Sputtering Process Shuichi TAJIRI1, Takanori ONISHI1, Yukiko OKANO1, Soichi OGAWA2 and Hiroshi MIMA3 1Okano Works, Ltd., Micro sensor Division, 6229 Izuo, Taisyo-ku, Osaka-shi, Osaka 5510031, Japan 2Ogawa Creation Research Laboratory, 7187 Karigutidai, Tarumi-ku, Kobe-shi, Hyogo 6550049, Japan 3Osaka City University, 33138 Sugimoto, Sumiyoshi-ku, Osaka-shi, Osaka 5588585, Japan
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