{"title":"Theoretical studies of the sensitivities of non-normal incidence methods for measuring the optical constants of thin films","authors":"L. Ward, A. Nag","doi":"10.1088/0508-3443/18/11/317","DOIUrl":null,"url":null,"abstract":"The sensitivity studies for methods of measuring n, k and d/λ of a thin film by optical methods have been extended to cases of non-normal incidence. The results for each pair of parameters are exhibited in the form of sensitivity diagrams. The diagrams for (Tp, Ts) and (Rp, Rs) at θ = 45°, 60° and 75° show overall high sensitivity over the region 0 3, k > 3.","PeriodicalId":9350,"journal":{"name":"British Journal of Applied Physics","volume":"60 1","pages":"1629-1636"},"PeriodicalIF":0.0000,"publicationDate":"1967-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"British Journal of Applied Physics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1088/0508-3443/18/11/317","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 7
Abstract
The sensitivity studies for methods of measuring n, k and d/λ of a thin film by optical methods have been extended to cases of non-normal incidence. The results for each pair of parameters are exhibited in the form of sensitivity diagrams. The diagrams for (Tp, Ts) and (Rp, Rs) at θ = 45°, 60° and 75° show overall high sensitivity over the region 0 3, k > 3.
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