Flexible Circuit Board Package Embedded With Multi-Stack Dies

N. Ueta, S. Sato, Masakazu Sato, Nakao Yoshio, Joshua P. Magnuson, R. Ishizuka
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Abstract

Miniaturization of electronics modules is always required for various medical applications including wearable technology, such as hearing aids, and implantable devices. Many types of high-density packaging technologies, such as package-on-package, bare-die stack, flex folded package and Through Si Via (TSV) technologies, have been proposed and used to fulfill the request. Among them, embedded die technology is one of the promising technologies to realize miniaturization and high-density packaging. We have developed WABE™ (wafer and board level device embedded) technology for embedding dies into multilayer flexible printed circuit (FPC) boards. The WABE package is comprised of thin dies (85 μm thickness), multi-layer polyimide, adhesive films and conductive paste. The dies are sandwiched by polyimide films with Cu circuits (FPCs). The conductive paste provides electrical connections between the layers as well as the layer and embedded die. First, each FPC layer is fabricated individually, and via holes are filled with conductive paste, and the dies are mounted on certain layers. Then, all layers undergo a one-step co-lamination process, and they are pressed to cure the adhesive material and conductive paste at the same time. This WABE technology has enabled multiple dies to be embedded by the one-step lamination process. Even if multiple dies are embedded, the footprint of a package can be reduced drastically by embedding multiple dies vertically in stacks. This paper describes the details of the results of fabricating a test vehicle with six embedded dies (three-dies in two stacks side-by-side). The fabricated test vehicle had 14 copper layers with less than 0.9 mm thickness. This paper also reports the results of various reliability testing on the package. These results were obtained by electrical measurements of daisy chain patterns formed between some of the layers. The fabricated test vehicle showed high reliability based on the results of a moisture and heat test and heat-shock test. These results show that the WABE technology to embed multiple dies vertically in polyimide film is one of the most promising packaging technologies to significantly miniaturize electronic circuits such as medical electronics.
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柔性电路板封装嵌入多堆栈芯片
各种医疗应用总是需要电子模块的小型化,包括可穿戴技术,如助听器和植入式设备。许多类型的高密度封装技术,如封装上封装、裸芯片堆叠、柔性折叠封装和通过Si Via (TSV)技术,已经被提出并用于满足这一要求。其中,嵌入式芯片技术是实现微型化和高密度封装的重要技术之一。我们开发了WABE™(晶圆和板级设备嵌入式)技术,用于将模具嵌入多层柔性印刷电路(FPC)板中。WABE封装由薄模具(厚度85 μm)、多层聚酰亚胺、胶膜和导电浆料组成。这些模具被带有Cu电路的聚酰亚胺薄膜(fpc)夹在中间。导电浆料提供层之间以及层与嵌入式模具之间的电连接。首先,每个FPC层单独制造,并通过孔填充导电浆料,并将模具安装在某些层上。然后,所有层都经过一步共层工艺,并同时压制粘合材料和导电浆料。这种WABE技术可以通过一步层压工艺嵌入多个模具。即使嵌入多个晶片,通过垂直堆叠嵌入多个晶片,也可以大大减少封装的占地面积。本文详细介绍了用6个嵌入式模具(3个模具并排放置在两堆)制造试验车的结果。制造的试验车辆有14层厚度小于0.9 mm的铜层。本文还报道了该封装的各种可靠性测试结果。这些结果是通过在一些层之间形成的菊花链图案的电测量得到的。根据湿热试验和热冲击试验的结果,制造的试验车具有较高的可靠性。这些结果表明,在聚酰亚胺薄膜中垂直嵌入多个芯片的WABE技术是实现医疗电子等电子电路小型化的最有前途的封装技术之一。
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