S. Edler, A. Schels, J. Biba, W. Hansch, M. Bachmann, F. Düsberg, Marinus Werber, C. Langer, M. Meyer, David von Bergen, A. Pahlke
{"title":"Publisher’s Note: “Silicon field emitters fabricated by dicing-saw and wet-chemical-etching” [J. Vac. Sci. Technol. B 39, 013205 (2021)]","authors":"S. Edler, A. Schels, J. Biba, W. Hansch, M. Bachmann, F. Düsberg, Marinus Werber, C. Langer, M. Meyer, David von Bergen, A. Pahlke","doi":"10.1116/6.0000974","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":17652,"journal":{"name":"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena","volume":"40 1","pages":"027001"},"PeriodicalIF":0.0000,"publicationDate":"2021-03-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1116/6.0000974","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}